• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    . The invention relates to an improved MEMS igniter (1,30,40,50), specially designed for action parts in grenades and missiles, comprising at least three discs joined together in the form of a disc stack, wherein the igniter (1,30,40,50) comprises an oxidizing agent (2) and a branch (4) separated from each other until activation of the igniter (1,30,40,50), the igniter (1,30,40,50) ) are arranged so that the oxidizing agent (2) in response to an acceleration and / or rotational force acting on the tooth (1,30,40,50) is transferred to the fuel (4) to form a set of teeth. The invention is characterized in that the oxidizing agent (2) is arranged in an oxidizing chamber (3) and the fuel (4) in a fuel chamber (5) and that the oxidizing agent (2) is transferred to the fuel (4) via a transfer channel (6,33,42,54 ) between the oxidizer chamber (3) and the fuel chamber (5). The invention also relates to a manufacturing method for said teeth (1,30,40,50). Fig. 1 25 30 35
    公开号:SE1200336A1
    申请号:SE1200336
    申请日:2012-05-31
    公开日:2015-06-27
    发明作者:Mats Runemård；Tommy Schönberg；Michael Carlsson
    申请人:Bae Systems Bofors Ab；
    IPC主号:
    专利说明:

    TECHNICAL FIELD The present invention relates to a igniter based on MEMS (Micro Electro Mechanical System) technology, intended for initiating manufacturing defects and components in manufacturing and disassembling components. .
    TROUBLESHOOTING AND BACKGROUND Today's conventional teeth are based on the use of a pyrotechnic set of teeth where the inert oxygen and fuel components are present in solid powder mixtures.
    A problem with the said teeth is the possibility of the tooth set for bumps and electrical discharges, which can lead to unintentional activation of the tooth. A more indiscriminate dentist is therefore unwelcome.
    Through the document SE 531 342 C2, the edge is a MEMS based igniter for initiating active parts in grenades or missiles where the possibility of bumps and electrical discharges has been eliminated. The igniter stores the oxygen and fuel components of the igniter, also the said oxidants and fuel, separate until the time of activation of the igniter. In response to an acceleration and / or rotational force, the oxidant is transferred to the industry so that a pyrotechnic set of teeth is formed. The pyrotechnic charge obtained is initiated after a given time delay. The tooth is made up of silicon wafers joined together in the form of a stack.
    A first disc comprises the oxidizing agent of the tooth arranged in a first and second chamber. A second disc comprises the fuel of the tooth arranged in a third chamber. In the first disc, two transfer channels are arranged from the oxidizer chambers to the fuel chamber. The transfer channels comprise disposable valves and are designed to transfer the oxidant to the fuel chamber in response to an acceleration and rotation force. A third disk is on top of the first disk forming an byre cover for the two oxidizer chambers. A fourth disc below the second disc forms a lower cover for the fuel chamber.
    A problem with said igniters is the complex structure with double oxidizer chambers and transfer channels for transferring oxidant to the fuel chamber. 1243 SE revised draft customer (2012-04-12) doc 1243 SE2 Dual transmission systems entailed a risk of malfunction when activating the tooth and thus a risk of no ignition.
    An additional problem is the variation in time that can occur when mixing oxidant and fuel, ie. the time it takes for the oxidant to be transported from the oxidizer tanks to the fuel tank and then mixed with the porous fuel. The mixing time depends, among other things, on the acceleration or rotational force and may exceed what is acceptable from an application point of view. Initiation of the set of teeth before complete mixing involves a risk of no teeth being ignited.
    OBJECT AND FEATURES OF THE INVENTION A main object of the present invention is an improved MEMS igniter in which the risk of non-ignition due to complex construction has been eliminated or greatly reduced.
    Another breathalyzer with the invention is a manufacturing method for said teeth.
    The aforesaid purposes, as well as other purposes not listed above, are met on a satisfactory salt within the framework of what is stated in the present independent patent claims.
    Thus, according to the invention, an improved tooth has been provided, in which the risk of non-ignition due to complex construction of the tooth has been eliminated or greatly reduced. The lighter is specially lit for grenades or missiles where the lighter is activated by acceleration and / or rotational forces.
    Teeth comprising at least three discs joined together in the form of a stack of discs, the igniter comprising an oxidizing agent and a branch separated from each other until activation of the igniter, the igniter being arranged so that the oxidizing agent in response to an acceleration and / or rotational force acting on the tooth is transferred to the fuel to form a set of teeth.
    A characteristic feature of the igniter is that the oxidizing agent is arranged in an oxidizer chamber and the fuel in a fuel chamber and that the oxidizing agent is transferred to the fuel via a transfer channel arranged between the oxidizer chamber and the fuel chamber.
    According to further aspects of the igniter according to the invention 1243 SE revised draft customer (2012-04-12) .doc 1243 SE3 that the igniter comprises four discs: a first disc comprising oxidizer chamber and a part of the transfer channel, a second disc below the first disc comprising the industry chamber , a third disc on top of the first disc comprising at least one openable and closable filler hall for filling oxidant in the oxidizer chamber, a fourth disc below the second disc comprising a mechanically weak section for directed action of the tooth set, a fifth disc between the first and second discs comprising a part of the transfer channel, that the igniter comprises four discs: a first disc comprising the oxidizer chamber and a part of the transfer channel, a second disc below the first disc, comprising the fuel chamber and a part of the transfer channel, a third disc on the first disc comprising at least one opening and sealable filling for filling oxidizing agent into the oxidizer chamber, a fourth disc comprising a mechanically weak section for directed action from the tooth set, the igniter comprising three discs: a first disc comprising the oxidizer chamber, the fuel chamber and a part of the transfer channel, a second disc above the first disc comprising at least an opening and closable filling hall for filling oxidant in the oxidizer chamber and a third disc below the first disc, comprising a part of the transfer channel and a mechanically weak section for directed action of the tooth set, that the tooth is activatable in response to an acceleration force acting on the tooth, wherein the tooth comprises four discs; a first disc comprising the oxidizer chamber, a second disc below the first disc comprising the fuel chamber, a third disc above the first disc, comprising at least one openable and closable filler A1 for filling oxidant in the oxidizer chamber, a fourth disc below the second disc, comprising a mechanically weak section for directed action frail the tooth set, a fifth disc arranged between the first disc and the second disc comprising the transfer channel wherein the oxidizer chamber, the transfer channel and the fuel chamber are positioned on top of each other, that the oxidizer chamber is formed as a pressure chamber for pressurizing the oxidizing agent and distinct transfer of the oxidizing agent from the oxidizing chamber to the fuel tank upon activation of the igniter, that the gas comprises oxygen gas, 1243 SE revised draft to the customer (2012-04-12) .doc 1243 SE4 that the second disc comprises an electrical initiating device for initiating the igniter, that the igniter comprises two disposable valves, one disposable valve being arranged between the oxidizer chamber and the inlet to the transfer channel and the other between the fuel chamber and the outlet of the transfer channel, that the two disposable valves comprise thin silicon membranes dimensioned to burst and / or rotational force acting on the igniter, that the two silicon diaphragms are integrated with discs comprising the oxidizer chamber and the fuel chamber, that the disposable valves comprise metal reinforcements designed to be fired via an electrical short circuit.
    A characteristic feature of the process is that the oxidizer chamber, the industry chamber and the transfer channel are manufactured directly in the disks via an etching process by etching predefined areas of the disks in a three-step process, wherein; 1 / a 10 μm thick photoresist is patterned on the respective disk bulk layer for use as an etching mask in the etching process, 2 / etching of the disk bulk layer, 3 / etching the disk insulator layer, According to further aspects of the manufacturing process of the invention the bulk layer is etched with DRIE (Deep Reactive Ion Etch ) technology for producing vertical cradles and high surface roughness, that etching of the insulator layer is performed with plasma technology, that the boards are joined together via anodic bonding and / or via thermocompressive bonding with glass-free. 1243 SE revised draft customer (2012-04-12) .doc 1243 SE ADVANTAGES AND EFFECTS OF THE INVENTION The invention entailed a number of important advantages and effects of which the most important are; Simple construction of the tanner with a few parts, which's the system's functionality and safety and eliminates or greatly reduces the risk of no teething.
    The igniter's simple construction in combination with the possibility of pressurizing the oxidizer chamber provides a fast and distinct transfer of the oxidant, which increases the safety of the system and thereby reduces the risk of no ignition.
    Improved opening function of the narrowing valves through the use of flammable metal reinforcements guarantee things opening of the valves regardless of variations in acceleration or rotational forces, which meant increased safety and lower risk of missing ignition.
    Additional advantages and effects of the invention will become apparent from the following detailed description of the invention, including a number of its advantageous embodiments, the claims and the accompanying drawings.
    DETAILED DESCRIPTION The invention will be described in more detail with reference to the accompanying drawing figures; 1 - 14 days: Fig. 1 schematically shows a view, seen obliquely from above, of a tooth that can be activated in response to a combined acceleration and rotation force. The igniter is made up of four discs, the oxidizer chamber being arranged in the second disc, the fuel chamber in the fourth disc and the transfer channel in the second and third discs, raked from above.
    Fig. 2 schematically shows a side view of the tooth according to Fig. 1.
    Fig. 3 schematically shows a view, obliquely from above, of the uppermost disc according to Fig. 1, the filling tail appearing.
    Fig. 4 schematically shows a side view of the disc in figure 3. 1243 SE revised draft customer (2012-04-12) .doc 1243 SE6 Fig. 5 schematically shows a view, obliquely from above, of the second disc in figure 1, where the disposable valves and parts of the transfer channel are shown.
    Fig. 6 schematically shows the underside of the disc in Fig. 5, where the metal reinforcement under the oxidizer chamber appears.
    Fig. 7 schematically shows a side view of the disc in Fig. 5, where the oxidizer chamber and parts of the transfer channel appear.
    Fig. 8 schematically shows a view, obliquely from above, of the third disc according to Fig. 1, where parts of the transfer channel appear.
    Fig. 9 schematically shows a side view, of the third disc, according to Fig. 8, where parts of the transfer channel appear.
    Fig. 10 schematically shows a side view, obliquely from above, of the fourth disc according to Fig. 1, where the fuel tank container and the initiating device appear.
    Fig. 11 schematically shows a side view, of the fourth disc according to Fig. 10, where the location of the fuel container is shown.
    Fig. 12 schematically shows a side view of a tooth with an alternative design which can be activated via a combined acceleration and rotation force. The igniter is made up of four discs, the oxidizer chamber being arranged in the second disc, the fuel chamber in the fourth disc and the transfer channel in the second and third discs, shaved from above.
    Fig. 13 schematically shows a longitudinal section of a side view of a tooth with an alternative design where the tooth is activatable via a combined acceleration and rotational force. The tooth is made up of three discs, the oxidizer chamber and the industry chamber being arranged in the second disc and the transfer channel in the first, second and third discs, razed from above.
    Fig. 14 schematically shows a longitudinal section of an alternative tine activatable via an acceleration force. The igniter is made up of four discs where the oxidizer chamber is arranged in the second disc, the fuel chamber in the fourth disc and the transfer channel in the third disc, shaved from above. 1243 SE revised draft customer (2012-04-12) .doe 1243 SE7 The invention, according to Figures 1 - 14, involved an improved igniter of the MEMS type, where the risk of non-ignition due to complex construction has been eliminated or greatly reduced.
    The tooth according to the invention is built up of at least three silicon and / or glass discs, joined together in the form of a stack. The discs comprise the oxidant's oxidant and industry separate from each other in separate storage chambers, consisting of an oxidizer chamber and an industry chamber. The igniter is designed to transmit the oxidant from the oxidizer chamber to the fuel chamber via a transfer channel, in response to an acceleration and / or rotational force acting on the tooth, the oxidant being absorbed into the porous industry structure of the fuel chamber after transfer so that a pyrotechnic set of teeth is formed.
    The igniter is specially lamped for initiating action parts in a grenade or missile, the igniter being activated via a combined acceleration and rotational force in the grenade or missile.
    In an alternative embodiment, the tooth is designed to be activated by an acceleration force, which means that the tooth can not be used in alternative applications such as, for example, gas generators for inflating airbags.
    Figures 1 - 11 show a preferred embodiment of the tooth 1, designed to be activated by a combined acceleration and rotation force. The tooth 1 is made up of five. discs joined together in the form of a stack. The discs are named, the first disc 10, the second disc 11, the third disc 12, the fourth disc 13 and the fifth disc 14, with the order disc 12,10,14,11,13 shaved from top to bottom in the stack.
    The first disc 10 of the stack comprises the oxidizing agent 2 of the tooth 1 arranged in an oxidizing chamber 3 and part of the transfer channel 6 which connects the oxidizing chamber 3 to the fuel chamber 5. The oxidizing chamber 3 is, preferably, cylindrical but may also have a different design, for example charge form. The oxidizing agent 2 dr, preferably, is liquid and comprises a dinitramide salt dissolved in a solvent, for example tetrahydrofuran or dimethylformamide. Other oxidizing agents that can be used to advantage are, hydroxylammonium nitrate or propylene oxide, nitric acid, and hydrogen peroxide. 1243 SE revised draft to customer (2012-04-12) .doc 1243 SE8 The second disc 11 of the stack comprises the branch 1 of the tanner 1, arranged in a branch chamber 5. The fuel chamber 5 there, preferably, cylindrical, but can also have another shape, for example lAdform . The fuel 4 preferably consists of a cohesive porous or nanoporous silicon structure capable of rapidly absorbing sinks. High-porous silicon structures of the type mentioned are known from the past and are not mentioned further in the following description. Alternatively, a porous fuel in powder form can be used.
    The third disc 12 of the stack is arranged on the first disc 10 and comprises at least one filling opening 8,8 'for filling oxidizing agent 2 to the oxidizing chamber 3.
    The filling opening 8,8 'comprises a standard type of disposable opening and closing valve, not described in more detail in the following text. The filling openings 8,8 'are manufactured, for example, via laser drilling. The third disc 12 is, preferably, made of glass but can also be made of silicon.
    The fourth disc 13 of the stack is arranged on the underside of the second disc 11 and comprises a mechanical weakening 9 below the industry chamber 5. The mechanical weakening 9 is designed to give a directed tooth action from the tooth set. The weakening is designed, for example, by etching away a predefined area in the fourth disc 13.
    The fifth disc 14 of the stack is arranged between the first disc 10 and the second disc 11 and comprises the main part of the transfer channel 6 and a river chamber between the transfer channel 6 and the fuel chamber 5. The function of the river chamber is to facilitate and speed up the flow of the washable oxidant 2 into the porous fuel 4. porer.
    The transfer channel 6 between the oxidizer chamber 3 and the fuel chamber 5 is, as previously mentioned, arranged in the first disc 10 and in the fifth disc 14. In the transfer channel 6 there are also arranged two openable disposable valves 7, T, where the first disposable valve 7 is arranged between the oxidizer chamber 3 and the transfer channel 6 and the second disposable valve 7 'between the fuel chamber 5 and the transfer channel 6. In a special variant of the igniter 1, the transfer channel 6 comprises only a disposable valve 7 arranged between the oxidizer chamber 7 and the fuel chamber 5. Adjacent to the fuel chamber 5, on top of the second disc 11, an initiating device 16 is also provided. The initiating device 16 preferably consists of an electrical resistance bridge connected to two current conductors 15. 1243 SE revised draft customer (2012-04-12) .doc 1243 SE9 Disposable valve 7 under the first disc 10 between the oxidizer chamber 3 and the transfer channel 6 is dimensioned to be opened in response t a given acceleration force acting in vertical direction on the igniter 1. The second disposable valve 7 'on the underside of the fifth disc 14 between the fuel chamber 5 and the transfer channel 6 is opened by the pressure generated by the liquid oxidizing agent 2 in response to a certain rotational force acting on the igniter 1 .
    Between the transfer channel 6 and the second entrance valve 7 'in the first disc 10 there is arranged a bridge 20 of silicon, designed to provide high stability and a good adhesion when joining the discs 10,14. The silicon bridge 20 ensures that the discs 10, 14 are in planar contact with each other and that a hermetically sealed joint is formed at the second entrance valve 7 '. A possible leakage may mean that the oxidizing agent 8 is led past the second angular valve 7 '. The transfer channel 6 is manufactured by etching away predefined areas in the first and fifth discs 10, 14, see Figures 4 and 7. In the first disc 10 a thin layer of material is left in the form of a silicon bridge 20 in the joint between the discs 10, 14.
    The two disposable valves 7,7 'are, preferably, designed as thin silicon membranes comprising silica (SiO 2) and / or silicon nitride (Si 3 N 4). The diaphragm valves are integrated with the two discs 10,14 and are formed in connection with the manufacture of the oxidizer chamber 3 and the fuel chamber 5 via an etching process. The disposable valves 7,7 'can also consist of separate valves which are mounted in connection with the oxidizer chamber 3 and the fuel chamber 5. To the two disposable valves 7, 7' there are also arranged metal reinforcements 17, the function of which is to prevent accidental breakage in the valves 7,7 ' which may arise during the manufacture, transport and charging of the tooth 1.
    The metal reinforcements 17 are arranged on the underside of the circular valves 7,7 '. The metal reinforcements 17 are preferably made of metal sheets comprising, 10 - 20 mechanically weak sections 18, see figure 6, the sections 18 being designed to rupture at a given applied electrical voltage via the electric current conductors 19. The mechanically weak sections 18 are joined, suitably, via a resistance wire dimensioned to be combusted at a given electric current from the current conductors 19. As an effect of the resistance wire being burned, the sections 18 rupture under the influence of the pressure from the disposable valve and the oxidizing agent 2, whereby the metal reinforcement breaks down. The use of metal reinforcements 17 meant that the time of opening of the steam valves 7,7 'can be controlled with high precision, which meant that the time it takes for the oxidizing agent 2 to mix with the fuel 4 can be calculated with high accuracy. The metal lining reinforcements 17 can have different designs. 1243 SE revised draft customer (2012-04-12) .doc 1243 SE The third disc 12, ie. the top disk in the stack, is joined to the first disk 10, the underlying disk, by anodic bonding. The third disc is made of glass and the first disc 10 of silicon. The first disc 10, in turn, 5 is joined to the fifth disc 14 by thermocompressive bonding with glass, i.e. use of glass material with a low melting point for smoothing out irregularities in the joint. The fifth disc 14 is made of silicon or glass. The second disc 11 containing the industry chamber 5 dr made of silicon and joined to the fifth disc 14 by thermocompression with glass free. The fourth disc 13, which constitutes the bottom disc of the stack, is made of glass or silicon and is suitably joined to the second disc 11 by anodic bonding.
    The use glass-free in joining the first and fifth sheets 10,14 meant that a small distance, typically 10 [cm], is formed between the first sheet 10 and the surface of the porous fuel 4, which makes it easier for the liquid oxidant 2 to fill it. porous industry structure.
    Anodic bonding meant that two disks 2,3 were heated to about 400 degrees C while an electrical voltage of typically 1000 V was applied over the two disks, 2,3, the cathode being connected to the first disk 2, which is made of glass. Due to the increased temperature, the sodium ions are mobilized in the glass and these migrate Over to the cathode where they are neutralized. Remaining in the glass becomes immobile oxygen, which forms an oxide layer in the silicon layer of the second disk, whereby a permanent hermetic joint is formed.
    The advantage of anodic bonding is above all its simplicity, which gives reliable results, provided that the boards are flat and that the surfaces that are joined do not contain any structures.
    Thermocompressive bonding with glass-free meant that a glass material with a low melting point was used as a joint material between the boards to create a hermetic joint. The process is thermocompressive, i.e. the joining occurs when the boards are heated and pressed against each other. The joint material is applied to the surface of one board via screen printing, after which the joint material as an effect of the heating adheres to the surface of the other board. A 30 [cm thick screen pressure results in about 101 μm thick final joint. The advantage of thermocompressive bonding with glass-free is that the requirement for electrical insulation of the electrical conductor that passes the joint to the resistance bridge on the tooth set is low because the joint material itself is electrically insulating. 1243 SE revised draft customer (2012-04-12) .doe 1243 SE11 The method with thermocompressive bonding also works very well on uneven surfaces in that the joint material evens out level differences ph up to several Rm. The fuel chamber 5 is manufactured directly in the second disc 11 via an etching process, whereby a cylindrical area etched is removed from the second disc 11. PA correspondingly, the oxidizer chamber 3 and the transfer channel 6 are manufactured by etching the first disc 10 and the fifth disc 14.
    In a special embodiment, the second disc 11 comprises a lower closure of the fuel chamber 7 in the form of a thin silicon layer forming an integral part of the second disc 11, which meant that the fourth disc 13 is superfluous. The closure is made by saving a thin layer of the bulk silicon on the underside of the fourth disc 13 when etching the fuel chamber 5. The silicon layer then forms the lower chamber of the fuel chamber 5 at the same time as it forms a mechanical weakening of the tooth set 1 to achieve a directional effect.
    In a further special embodiment, the first disc 10 has been designed as an upper closure to the oxidizer chamber 3, in the form of a thin silicon layer, which forms an integral part of the first disc 10, which meant that the third disc 12 becomes superfluous.
    In order to contact the current conductors 19, 15 to the initiating device 16 resp. to the metal reinforcements 17, the board stack needs to be sawn in several levels, ie. partly a level for sawing out the discs and partly a level for exposing the two current conductors 19,15, see figure 1. As can be seen from figures 1 and 2, this meant that the contact surfaces of the current conductors to the initiating device 16 and the metal reinforcements 7,7, current conductors 15 resp. 19 arranged on opposite sides of the stack 1. The arrangement with the electrical contact surfaces on opposite sides of the stack can, however, be an increased complexity when contacting the tooth 1. In a special case of the contacting, the initiating device 16 has therefore been placed on the other side of the porous branch, ie. under the second disc 11, which meant that the current conductors 19 of the initiating device 16 and the metal reinforcements 7,7 end up on the same side of the stack but at different levels corresponding to the thickness of the second and fifth disc 11,14 together.
    In a further special case where the initiating device 1 is placed in its original place, the current conductors 19,15 can be pulled at the same level by taking up electrical bushings in the fifth disc 14. A disadvantage, however, is the additional process steps this entailed. 1243 SE revised draft customer (2012-04-12) .doc 1243 SE12 Figure 12 shows an alternative design of a tooth 30 designed to be activated in response to a combined acceleration and rotation force acting on the tooth 30. The tooth 30 is constructed of four discs, a first disc 10 comprising the oxidizer chamber 3 and a part of the transfer channel 32, a second disc 31 comprising the fuel chamber 5 and a part of a transfer channel 32, a third disc 10 comprising filling hall 8,8 'for filling oxidizing agent 2 in the oxidizing chamber 3 , a fourth disc 13 comprising a mechanically weak section 9 below the industry chamber 5, the weak section 9 being formed as a recess in the fourth disc 13. The advantage of the tooth 30 according to the alternative embodiment in Figure 12 is a simpler construction by four discs replaced with four discs, which enables a thinner and lighter tooth 40 and thus related manufacturing and cost advantages.
    Figure 13 shows a second alternative design of a tooth 40 according to the invention designed to be activated in response to a combined acceleration and rotation force acting on the tooth 40. The tooth 40 is made up of three discs; a first disc 42 comprising an oxidizer chamber 3, the fuel chamber 5 and a part of a transfer channel 44, a second disc 41 on top of the first disc 42, comprising filling hall 8,8 'for filling oxidizing agent 2 in the oxidizing chamber 3, and a third disc 43 comprising mechanically weak section 9 below the industry chamber, the weak section 9 being formed as a groove in the third disc 43. The advantage of the tooth 40 according to the second alternative design in Figure 13 is a further simplification of the structure of the tooth 40 by replacing four discs with three discs, which meant a thinner and lighter teeth 40 and clamed coherent manufacturing and cost benefits.
    Figure 14 shows a third embodiment of a igniter 50 according to the invention designed to be activated in response to an acceleration force acting on the igniter 50. The igniter 50 is built up of four discs; a first disc 51 comprising the oxidizer chamber 3 of the tanner 50, a second disc 11 comprising the fuel chamber 5 of the tanner 50, a third disc 12, on top of the first disc 51, comprising filling hall 8,8 'for filling oxidant 2 in the oxidizer chamber 3, a fourth disc 13 , below the second disc 11, comprising mechanically weak section 9 below the industry chamber 5, the weak section 9 being formed as a recess in the fourth disc 13 and a fifth disc 52, between the first disc 51 and the second disc 11, comprising a transfer channel 53 for Transfer of oxidant 2 flirting oxidizer chamber 3 to 1243 SE revised draft customer (2012-04-12) .doc 1243 SE13 industry chamber 5, the transfer channel 53 being positioned between oxidizer chamber 3 and industry chamber 5.
    In a special case, the oxidizer chamber 3 of the tine 1,30,40,50 has been designed as a pressure chamber, dimensioned to comprise a liquid oxidizing agent 8 pressurized with a gas. Because the gas pressure, upon activation of the igniter, presses the liquid-shaped oxidizing agent 8 in front of it through the transfer channel 11, a fast and efficient transfer of the oxidizing agent 8 is ensured regardless of any variations in acceleration and / or rotational forces. The gas may, for example, comprise oxygen, air, nitrous oxide or mixtures thereof. For a valve diaphragm with a diameter of 2 mm and 101 .mu.m thickness, the gas pressure in the oxidizer chamber 3 should be in the range: 2 - 5 bar to ensure complete emptying of the oxidizer chamber 7. The oxidizer chamber 7 is dimensioned for a maximum pressure of 10 bar.
    Manufacture of the oxidizer chamber 3, the industry chamber 5, the transfer channels 6,33,42,54 and the disposable valves 7,7 'in the various embodiments of the tooth 1,30,40,50 takes place, preferably, via a three-step etching process of disks made up of three stock; a bulk layer of silicon, an insulating layer of silicon dioxide (SiO2) and a tack layer of silicon. As a first step in the manufacturing process, a tm thick photoresist is sampled on the bulk stock of the disc to be used as an etching mask in etching. In a second step in the manufacturing process, the bulk layer of the board is etched away. When etching the bulk layer, a etching technique based on DRIB (Deep Reactive Ion Etch) is preferably used, which enables vertical structures with high surface roughness. Alternatively, a standard method can be used, which, however, can lead to structures with a slightly negative slope, ie. structures whose width increases with etching depth. In a third step in the manufacturing process, the insulator layer of the board is etched away, making it convenient to use a plasma method, which enables a directed and selective etching of the insulator layer.
    The invention is not limited to the embodiments shown but can be varied in various ways within the scope of the claims. 1243 SE revised draft customer (2012-04-12) .doc
    权利要求:
    Claims (17)
    [1]
    A tooth (1,30,40,50), specially designed for projectiles in projectiles, comprising at least three discs joined together in the form of a disc stack, the tooth (1,30,40,50) comprising an oxidizing agent (2) and a fuel (4) separated from each other until activation of the igniter (1,30,40,50), the igniter (1,30,40,50) being arranged so that the oxidizing agent (2) in response to an acceleration and / or rotational force acting on the igniter (1,30,40,50) is transmitted to the fuel (4) to form a set of teeth, characterized in that the oxidizing agent (2) is arranged in an oxidizer chamber (3) and the fuel (4) in a fuel chamber (5) and that the oxidizing agent (2) is transferred to the fuel (4) via a transfer channel (6,33,42,54) between the oxidizer chamber (3) and the fuel chamber (5).
    [2]
    A tooth (1) according to claim 1, characterized in that the tooth (1) comprises four discs: a first disc (10) comprising the oxidizer chamber (3) and a part of the transfer channel (6), a second disc (11) below the first the disc (10) comprising the fuel chamber (5), a third disc (12) on top of the first disc (10) comprising at least one openable and closable filling hall (8, 8 ') for filling oxidizing agent (2) in the oxidizing chamber (3), a fourth disc (13) below the second disc (32) comprising a mechanically weak section (12) for directed action of the tooth set, a fifth disc (14) between the first (10) and the second disc (11) comprising a part of the transfer channel (6).
    [3]
    A tooth (1) according to claim 1, characterized in that the tooth (30) comprises four discs: a first disc (10) comprising the oxidizer chamber (3) and a part of the transfer channel (32), a second disc (31) below the first the disc (13), comprising the fuel chamber (5) and a part of the transfer channel (32), a third disc (31) on the first disc (10) comprising at least one openable and closable filling hall (8, 8 ') for filling oxidizing agent (2) in the oxidizer chamber (3), a fourth disc (13) comprising a mechanically weak section (9) for directed action from the tooth set.
    [4]
    A tooth (40) according to claim 1, characterized in that the tooth (40) comprises three discs: a first disc (42) comprising the oxidizer chamber (3), the fuel chamber (5) and a part of the transfer channel (44), a second disc ( 31) on top of the first disc (42) comprising at least one opening and 1243 SE revised draft to the customer (2012-04-12) Anc 1243 SE closable filling hall (8, 8 ') for filling oxidizing agent (2) in the oxidizer chamber (3 ) and a third disc (43) below the first disc (42), comprising comprising a mechanically weak section (9) for directed action from the tooth set and a part of the transfer channel (44).
    [5]
    A tooth (50) according to claim 1, characterized in that the tooth (50) is activatable in response to an acceleration force acting on the tooth (50), the tooth (50) comprising four discs; a first disc (31) comprising the oxidizer chamber (4), a second disc (11) below the first disc (31) comprising the fuel chamber (5), a third disc (12) on top of the first disc (31), comprising at least one opening and closable filling hall (8, 8 ') for filling oxidizing agent (2) in the oxidizing chamber (3), a fourth disc (13) below the second disc (11), comprising a mechanically weak section (9) for directed action from the tooth set, a fifth disk (52) disposed between the first disk (31) and the second disk (11) comprising the transfer channel (53), the oxidizer chamber (3), the transfer channel (53) and the fuel chamber (5) being positioned on top of each other.
    [6]
    Igniter (1,30,40,50) according to any one of the preceding claims, characterized in that the oxidizer chamber (4) is designed as a pressure chamber for pressurizing the oxidizing agent (8) with a gas for fast and distinct transfer of the oxidizing agent (8). frail the oxidizer chamber (3) to the fuel tank container (11) upon activation of the igniter (1,30,40,50).
    [7]
    A tooth (1,30,40,50) according to claim 5, characterized in that the gas comprises oxygen.
    [8]
    A tooth (1,30,40,50) according to claim 1, characterized in that the second disc 12 comprises an electrical initiating device (19) for initiating the tooth set.
    [9]
    A tooth (1,30,40,50) according to any one of the preceding claims, characterized in that the tooth (1,30,40,50) comprises two disposable valves (7,7 '), one disposable valve (7) being provided between the oxidizer chamber (4) and the inlet to the transfer channel (6,33,42,54) and the other between the fuel chamber (5) and the outlet from the transfer channel (6,33,42,54). 1243 SE revised draft customer (2012-04-12) .doc 1243 SE16
    [10]
    A tooth (1,30,40,50) according to claim 9, characterized in that the two disposable valves (9,10) comprise thin silicon membranes dimensioned to burst by a pressure from the oxidizing agent (4) caused by an acceleration and / or rotational force acting on tandaren (1,30,40,50).
    [11]
    A tooth (1,30,40,50) according to claim 10, characterized in that the two silicon membranes are integrated with disks (13,31,41) comprising the oxidizer chamber (4) and the fuel chamber (5).
    [12]
    A igniter (1,30,40,50) according to any one of the preceding claims, characterized in that the disposable valves (13,14) comprise metal reinforcements (17) designed to be fired off via an electrical short-circuit (19).
    [13]
    A method of manufacturing a igniter (1,30,40,50) comprising at least three silicon and / or glass sheets comprising an oxidizing agent (4) arranged in an oxidizing chamber (3) and a fuel (5) arranged in a fuel chamber ( 5), separated from each other until activation of the igniter (1,2,3) to transfer the oxidizing agent (4) from the oxidizing chamber (3) to the fuel chamber (5) in response to an acceleration and / or rotational force acting on the igniter (1) via a Transfer Channel (6,33,42,54) for mixing a set of teeth, characterized in that the oxidizer chamber (9), the fuel chamber (11) and the transfer channel (6,33,42,54) are manufactured directly in the discs by an etching process by Predefined rows of boards in the discs are etched in a three-step process, wherein; 1 / a 10 tm thick photoresist is sampled on the bulk storage of the respective disk for use as an etching mask in the etching process, 2 / etching of the bulk layer, 3 / etching of the insulator layer.
    [14]
    A manufacturing method according to claim 13, characterized in that the bulk layer is etched with DRIE (Deep Reactive Ion Etch) technology to achieve vertical cradles and high surface roughness.
    [15]
    Manufacturing method according to claim 13, characterized in that etching of the insulator layer is performed with plasma technology.
    [16]
    Manufacturing method according to claim 13, characterized in that the discs are joined together via anodic bonding and / or via thermocompressive bonding with glass-free. 1243 SE revised draft customer (2012-04-12) .doc 1243 SE17
    [17]
    Manufacturing method according to claim 16, characterized in that glass sheets with a low melting point are used as a joint material to provide a hermetically sealed joint between the sheets. 1243 SE revised draft customer (2012-04-12) .doc 0th PefilitrePhlaverket 2012 -05- 31 1/8 1
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    同族专利:
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    SE537915C2|2015-11-17|
    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    CN105371713A|2015-11-17|2016-03-02|西安交通大学|Partition-type micro-electromechanical systemfuze|
    法律状态:
    2017-01-31| NUG| Patent has lapsed|
    优先权:
    申请号 | 申请日 | 专利标题
    SE1200336A|SE537915C2|2012-05-31|2012-05-31|Lighters for grenades and missiles as well as manufacturing procedures|SE1200336A| SE537915C2|2012-05-31|2012-05-31|Lighters for grenades and missiles as well as manufacturing procedures|
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